JPH0526966Y2 - - Google Patents
Info
- Publication number
- JPH0526966Y2 JPH0526966Y2 JP1986059947U JP5994786U JPH0526966Y2 JP H0526966 Y2 JPH0526966 Y2 JP H0526966Y2 JP 1986059947 U JP1986059947 U JP 1986059947U JP 5994786 U JP5994786 U JP 5994786U JP H0526966 Y2 JPH0526966 Y2 JP H0526966Y2
- Authority
- JP
- Japan
- Prior art keywords
- recorder
- channel
- main body
- memory
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Recording Measured Values (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986059947U JPH0526966Y2 (en]) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986059947U JPH0526966Y2 (en]) | 1986-04-21 | 1986-04-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62170523U JPS62170523U (en]) | 1987-10-29 |
JPH0526966Y2 true JPH0526966Y2 (en]) | 1993-07-08 |
Family
ID=30891924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986059947U Expired - Lifetime JPH0526966Y2 (en]) | 1986-04-21 | 1986-04-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0526966Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6809808B2 (en) * | 2002-03-22 | 2004-10-26 | Applied Materials, Inc. | Wafer defect detection system with traveling lens multi-beam scanner |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61281317A (ja) * | 1985-05-30 | 1986-12-11 | Sanyo Electric Co Ltd | 増設メモリカ−トリツジの使用可能な電子機器 |
-
1986
- 1986-04-21 JP JP1986059947U patent/JPH0526966Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS62170523U (en]) | 1987-10-29 |
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